Safe for people, media, and process.
Dispensing systems
for precise results.
When dispensing process gases and liquids in high-purity media technology, every detail matters. Our dispensing systems are designed so that process media can be dispensed safely and intuitively. Whether you choose a partially or fully automated version, every Logitex dispensing system is ergonomically designed to be easy to operate at every point of contact.
Coded connections and pressure-controlled valves enable contact-free - and above all mix-up-proof - dispensing, while also ensuring an uninterrupted, bubble-free supply. Our systems protect operators and workflows at all times, prevent contamination, and keep the medium ultra-pure.
We design every dispensing system to precisely match your requirements - from the internal system concept to the right solution for different media and container sizes. This also includes complete emptying of transport containers, when the process requires it.
Custom-built, not off the shelf.
Precisely fitted solutions
for every medium.
Logitex dispensing systems have been used in the semiconductor industry for many years. They've also proven themselves in daily use in fiber optics and coating processes - wherever high-purity media need to be supplied in a stable, safe, and repeatable way.
Facts. Media. Possibilities.
Options and
additional feature.
Flüssigkeiten:
- Isopropanol (IPA)
- Tetraethyl Orthosilicate (TEOS)
- Trichlorosilane (TCS)
- Trimethylaluminium (TMA)
- Hydrogen Chloride (HCl)
- etc.
Gase:
- Silane (SiH4)
- Hydrogen (H2)
- Inert gases (Ar, He, N2)
- etc.
- Central supply of chemicals/solvents from transport containers
- Refill systems for process/laboratory systems
- Individual system supply
- Drain systems/disposal
- Filtration
- Distillation
- Phase separator
- WHG containment basin (WHG-compliant)
- ATEX-compliant
- Recirculation
Custom solutions. Special topics.
Complex requirements? Right up our alley.
Facing a technical challenge with high-purity media and looking to take your system to the next level?
Together, we'll find the right solution.
Get in touch now